Considering Fig. 10.25, at least how many images are needed to figure out the interconnections of this chip? 1. Assuming that a shield is placed on the top layer of the chip, the shield width is 150...


Considering Fig. 10.25, at least how many images are needed to figure out the interconnections of this chip?


1. Assuming that a shield is placed on the top layer of the chip, the shield width is 150 nm, the shield space is 500 nm, the shield wire thickness is 200 nm, a target wire is on metal 2 and the shield to target layer depth is 5000 nm, what is the maximum FIB aspect ratio that this shield can protect against?




May 18, 2022
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